- 25.5-inch diameter x 12-inch high stainless steel, water-cooled deposition chamber designed for waist high substrate loading and unloading.
- 25.5-inch diameter x 20 inch high stainless steel, evaporation source chamber with model VV-400 View Vac view port with Teflon film.
- CTI 400 On-Board cryogenic pump. (Recently rebuilt).
- CTI 9600 Helium compressor. (Purchased new 2 month prior to system shutdown)
- Mechanical vacuum pump.
- Auto / manual vacuum valve sequence controller
- Ionization gauge and thermocouple gauge controller.
- Inficon IC6000 Auto/Manual Deposition rate / process controller.
- CV-14, 14kW electron beam power supply with X-Y beam sweep controller.
- Temescal Four (4) pocket electron beam gun with crucible indexer.
- Source shutter assembly fully integrated with deposition controller.
- Substrate tooling for Lift-off deposition process. (Optional tool quoted seperatly)
- System manuals
- Optional: Neslab HX350 air cooled water chiller / recurculator.Vintage: 1991
