CHA 600 E-beam Evaporation System

SYSTEM FABRICATION

• Cabinet, Steel Framework, System Mounted on castors
• Fully-enclosed system cabinet with full opening service door

DEPOSITION CHAMBER:

• 19.5"diameter X 30" high, stainless steel, water-cooled bell jar
• 20" diameter stainless steel base plate with 1" diameter feedthrough ports
• One (1) complete set of stainless steel chamber and source chamber shielding
• Motorized bell jar hoist assembly

PUMPING SYSTEM:

• Cryogenic pump
• CTI-8 cryo with SC helium compressor

ROUGHING PUMP

• 27 cfm roughing pump

HIGH VACUUM VALVES

• HV valve, roughing valve, foreline valve, vent valve.

CHAMBER GAUGING:

• Granville Phillips combination ionization and TC gauge.

VACUUM CONTROLLER:

• CHA AutoTech II Auto/Manual vacuum valve sequence controller with vacuum map and static indicator lights for valve positioning. (Auto/Manual mode protected via keylock selector switch)

DEPOSITION:

• E-beam
• 6 pocket,15cc Electron Beam Gun
• 6 pocket crucible indexer.
• CV-8, 8kW power supply with X-Y beam sweep controller.

DEPOSITION SOURCE SHUTTER:

• Electro-pneumatic source shutter

DEPOSITION Controller

• Inficon IC5 Quartz crystal deposition controller
• Single quartz crystal sensor (water-cooled)

SUBSTRATE HEAT: Optional

SUBSTRATE FIXTURING:

• Planetary or Lift-off tooling available.
• Substrate rotation assembly with variable speed drive motor.

SYSTEM DOCUMENTATION:OEM manuals.