Description:

CHA Mark 50 E-Beam Evaporation System. (Multiple units available. Configured to your specification) CTI-400 On-board Cryo Pump.
CTI On-board Water Pump (Optional)
TT-6, 6kW E-Beam Power Supply with X-Y Sweep. (Maybe upgrade to larger size if required)
4 or 6 Pocket E-Beam Gun.
Auto-Tech II Vacuum Sequence Controller.
Inficon IC5 Deposition Rate Monitor.
Substrate tooling per customer requirments. (i.e. Lift-Off, Uniformity, Step Coverage, Adjustable Angle, Custom)

CHA Mark 50 Evaporation System

System is available in a fully operational and demonstrated condition at Semicore, Livermore, CA. Upgrades and modification may be quoted separately.