Temescal (BOC Edwards) BJD-1800 E-beam Evaporation System

SYSTEM FABRICATION

• Cabinet, Steel Framework, System Mounted on castors
• Fully-enclosed system cabinet with full opening service door

DEPOSITION CHAMBER:

• 20-inch diameter x 9-inch high stainless steel, deposition chamber designed for waist high substrate loading and unloading.
• 18-inch diameter stainless steel, evaporation source chamber with viewport

PUMPING SYSTEM:

• Cryogenic pump
• CTI-8 cryo with SC helium compressor

ROUGHING PUMP

• 27 cfm roughing pump

HIGH VACUUM VALVES

• High Vacuum poppet valve
• Roughing, Leak-check, Backing, and Vent Valves

CHAMBER GAUGING:

• Versavac combination ionization and TC gauge.

DEPOSITION:

• E-beam
• Telemark 271, 4 pocket, 30cc Electron Beam Gun
• 6 pocket crucible indexer.
• Hardwired safety interlocks (vacuum safety switch, cabinet switch, water switch).
• CV-8, 8kW power supply with X-Y beam sweep controller.

DEPOSITION SOURCE SHUTTER:

• Electro-pneumatic source shutter:

DEPOSITION Controller

• Maxtek 360 Quartz crystal deposition controller
• Single quartz crystal sensor (water-cooled)

SUBSTRATE HEAT:

• 2 kW quartz lamp substrate heating.

SUBSTRATE FIXTURING:

• Planetary or Lift-off tooling available.
• Substrate rotation assembly with variable speed drive motor.

VACUUM CONTROLLER:

• I. Temescal Auto/Manual vacuum sequence controller.

SYSTEM DOCUMENTATION:

• OEM manuals.