Temescal (BOC Edwards) FC 1800 (Fast-Cycle) E-beam Evaporation System

System is available in a fully operational and demonstrated condition at Semicore, Livermore, CA. Upgrades and modification may be quoted separately.

SYSTEM FABRICATION

Cabinet, Steel Framework, System Mounted on castors
Fully-enclosed system cabinet with full opening service door

DEPOSITION CHAMBER:

20-inch diameter x 9-inch high stainless steel, deposition chamber designed for waist high substrate loading and unloading.
18-inch diameter stainless steel, evaporation source chamber with viewport
Isolation valve between substrate and source chambers.

PUMPING SYSTEM:

Cryogenic pump
CTI-8 cryo with SC helium compressor

ROUGHING PUMP

27 cfm roughing pump

HIGH VACUUM VALVES

High Vacuum poppet valve
Roughing, Leak-check, Backing, and Vent Valves

VACUUM CONTROLLER:

Temescal Auto/Manual vacuum sequence controller.

CHAMBER GAUGING:

Versavac combination ionization and TC gauge.

DEPOSITION:

E-beam
4 pocket Electron Beam Gun
4 pocket crucible indexer.
CV-8, 8kW power supply with X-Y beam sweep controller.

DEPOSITION SOURCE SHUTTER:

Electro-pneumatic source shutter:

DEPOSITION Controller

FDC 8000 Quartz crystal deposition controller
Single quartz crystal sensor (water-cooled)

SUBSTRATE HEAT: Optional

SUBSTRATE FIXTURING:

Planetary or Lift-off tooling available.
Substrate rotation assembly with variable speed drive motor.

SYSTEM DOCUMENTATION:

OEM manuals

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