Temescal (BOC Edwards) BJD-1800 E-beam Evaporation System

System is available in a fully operational and demonstrated condition at Semicore, Livermore, CA. Upgrades and modification may be quoted separately.

SYSTEM FABRICATION

Cabinet, Steel Framework, System Mounted on castors
Fully-enclosed system cabinet with full opening service door

DEPOSITION CHAMBER:

20-inch diameter x 9-inch high stainless steel, deposition chamber designed for waist high substrate loading and unloading.
18-inch diameter stainless steel, evaporation source chamber with viewport

PUMPING SYSTEM:

Cryogenic pump
CTI-8 cryo with SC helium compressor

ROUGHING PUMP

27 cfm roughing pump

HIGH VACUUM VALVES

High Vacuum poppet valve
Roughing, Leak-check, Backing, and Vent Valves

CHAMBER GAUGING:

Versavac combination ionization and TC gauge.

DEPOSITION:

E-beam
Telemark 271, 4 pocket, 30cc Electron Beam Gun
6 pocket crucible indexer.
Hardwired safety interlocks (vacuum safety switch, cabinet switch, water switch).
CV-8, 8kW power supply with X-Y beam sweep controller.

DEPOSITION SOURCE SHUTTER:

Electro-pneumatic source shutter:

DEPOSITION Controller

Maxtek 360 Quartz crystal deposition controller
Single quartz crystal sensor (water-cooled)

SUBSTRATE HEAT:

2 kW quartz lamp substrate heating.

SUBSTRATE FIXTURING:

Planetary or Lift-off tooling available.
Substrate rotation assembly with variable speed drive motor.

VACUUM CONTROLLER:

I. Temescal Auto/Manual vacuum sequence controller.

SYSTEM DOCUMENTATION:

OEM manuals.

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